If you made any changes in Pure, your changes will be visible here soon.

Research Output 1988 2019

  • 4415 Citations
  • 17 h-Index
  • 39 Conference contribution
  • 20 Article
  • 2 Chapter
  • 2 Patent
Filter
Chapter
2004
8 Citations (Scopus)

A comparison of PZT-based and TiNi shape memory alloy-based MEMS microactuators

Lai, B. K., Kahn, H., Phillips, S. & Heuer, A. H., Jan 1 2004, Ferroelectrics. Vol. 306. p. 221-226 6 p.

Research output: Chapter in Book/Report/Conference proceedingChapter

Microactuators
shape memory alloys
Shape memory effect
microelectromechanical systems
MEMS
2000

Control of residual stresses in as-grown polysilicon by multi-layer deposition: The "MultiPoly" process

Yang, J., Kahn, H., He, A. Q., Phillips, S. & Heuer, A. H., 2000, Materials Research Society Symposium - Proceedings. Vol. 605. p. 37-41 5 p.

Research output: Chapter in Book/Report/Conference proceedingChapter

Polysilicon
Residual stresses
Compressive stress
Tensile stress
Microstructure