Engineering & Materials Science
Micromotors
100%
Polysilicon
64%
MEMS
60%
Shape memory effect
42%
Networked control systems
31%
Thin films
30%
Rotors
29%
Sensors
28%
Actuators
24%
Bushings
24%
Ions
24%
Feedback control
24%
Microactuators
21%
Torque measurement
18%
Fabrication
18%
Atomizers
17%
Controllers
17%
Friction
16%
Gears
16%
Students
15%
Silicon
15%
Electrical engineering
14%
Residual stresses
14%
Clamping devices
14%
Feedback
14%
Surface micromachining
14%
Microrobots
14%
Low pressure chemical vapor deposition
13%
Molecules
13%
Robots
13%
Multivariable control systems
13%
Flanges
12%
Sputtering
12%
Electric potential
12%
Torque
11%
Gas turbines
11%
Control systems
11%
Degradation
10%
Signal processing
10%
Neurology
10%
Linearization
10%
Neural networks
10%
Turbines
10%
Control system analysis
10%
Switches
9%
Substrates
9%
Electrodes
9%
Shape-memory alloy
9%
Propulsion
8%
Temperature
8%
Chemical Compounds
Shape Memory Alloys
29%
Bushing
27%
Residual Stress
26%
Liquid Film
12%
Force
9%
Low Pressure Chemical Vapour Deposition
9%
Micromachining
9%
Torque
8%
Strain
7%
Crystallization Behavior
6%
Voltage
6%
Spray
6%
Communication
6%
Etching
5%
Multilayer
5%
Fuel
5%