If you made any changes in Pure these will be visible here soon.

Research Output

Nanoscale effects in devices based on chalcogenide solid solutions

Kozicki, M., Yun, M., Yang, S. J., Aberouette, J. P. & Bird, J. P., May 2000, In : Superlattices and Microstructures. 27, 5, p. 485-488 4 p.

Research output: Contribution to journalConference article

18 Scopus citations
1999

Novel nanoscale resist using 10-undecanoic acid monolayers on silicon dioxide

Kozicki, M., Yang, S. J., Kim, T. & Kardynal, B., Jun 1999, In : Microelectronic Engineering. 47, 1, p. 239-241 3 p.

Research output: Contribution to journalConference article

Transport in split gate MOS quantum dot structures

Goodnick, S., Bird, J., Ferry, D. K., Gunther, A. D., Khoury, M. D., Kozicki, M., Rack, M. J., Thornton, T. & Vasileska, D., Dec 1 1999, Proceedings of the IEEE Great Lakes Symposium on VLSI. IEEE, p. 394-396 3 p. (Proceedings of the IEEE Great Lakes Symposium on VLSI).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1998
16 Scopus citations

Application of chemically enhanced vapour etching in the fabrication on nanostructures

Kozicki, M., Kardynal, B., Yang, S. J., Kim, T., Sidorov, M. V. & Smith, D., Jan 1 1998, In : Semiconductor Science and Technology. 13, 8 SUPPL. A, p. A63-A66

Research output: Contribution to journalArticle

Equivalent circuit modeling of the Ag|As0.24S0.36Ag0.40|Ag system prepared by photodissolution of Ag

West, W. C., Seradzki, K., Kardynol, B. & Kozicki, M., Sep 1998, In : Journal of the Electrochemical Society. 145, 9, p. 2971-2974 4 p.

Research output: Contribution to journalArticle

15 Scopus citations

Programmable current mode Hebbian learning neural network using Programmable Metallization Cell

Swaroop, B., West, W. C., Martinez, G., Kozicki, M. & Akers, L. A., 1998, Proceedings - IEEE International Symposium on Circuits and Systems. Anon (ed.). IEEE, Vol. 3. p. 33-36 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Scopus citations

Structural characterization of ultrathin nanocrystalline silicon films formed by annealing amorphous silicon

Lützen, J., Kamal, A. H. M., Kozicki, M., Ferry, D. K., Sidorov, M. V. & Smith, D., Sep 1 1998, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 16, 5, p. 2802-2805 4 p.

Research output: Contribution to journalArticle

5 Scopus citations

Two-terminal nanocrystalline silicon memory device at room temperature

Kamal, A. H. M., Lutzen, J., Sanborn, B. A., Sidorov, M. V., Kozicki, M., Smith, D. & Ferry, D. K., Nov 1 1998, In : Semiconductor Science and Technology. 13, 11, p. 1328-1332 5 p.

Research output: Contribution to journalArticle

9 Scopus citations
1997

Electrical characterization of Uromyces germ tubes grown on integrated circuit substrates

McNally, H. A., Kozicki, M., Roberson, R. & Whidden, T. K., Jan 1 1997, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 15, 3, p. 779-783 5 p.

Research output: Contribution to journalArticle

Nanoscale lithography of silicon dioxide using electron beam patterned carboxylic acids as localized etch initiators

Whidden, T. K., Yang, S. J., Jenkins-Gray, A., Pan, M. & Kozicki, M., Feb 1997, In : Journal of the Electrochemical Society. 144, 2, p. 605-616 12 p.

Research output: Contribution to journalArticle

8 Scopus citations

Ultrathin cobalt silicide layers formed by rapid thermal processing of metal on amorphous silicon

Kamal, A. H. M., Rack, M. J., Kozicki, M., Ferry, D. K., Lützen, J. & Hallmark, J. A., Jul 1 1997, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 15, 4, p. 899-902 4 p.

Research output: Contribution to journalArticle

4 Scopus citations
1996

Nanolithography

Ferry, D. K., Khoury, M., Pivin, D. P., Connolly, K. M., Whidden, T. K., Kozicki, M. & Allee, D., Nov 1996, In : Semiconductor Science and Technology. 11, 11 SUPPL. S, p. 1552-1557 6 p.

Research output: Contribution to journalArticle

6 Scopus citations

Nanoscale patterning of silicon dioxide thin films by catalyzed HF vapor etching

Allgair, J., Ryan, J. M., Song, H. J., Kozicki, M., Whidden, T. K. & Ferry, D. K., Dec 1 1996, In : Nanotechnology. 7, 4, p. 351-355 5 p.

Research output: Contribution to journalArticle

9 Scopus citations

Pattern transfer to silicon by microcontact printing and RIE

Whidden, T. K., Ferry, D. K., Kozicki, M., Kim, E., Kumar, A., Wilbur, J. & Whitesides, G. M., Dec 1 1996, In : Nanotechnology. 7, 4, p. 447-451 5 p.

Research output: Contribution to journalArticle

75 Scopus citations

Programmable Metallization Cell

Kozicki, M., Jan 29 1996

Research output: Patent

Self-assembled monolayer resists and nanoscale lithography of silicon dioxide thin films by chemically enhanced vapor etching (CEVE)

Pan, M., Yun, M., Kozicki, M. & Whidden, T. K., Oct 1996, In : Superlattices and Microstructures. 20, 3, p. 369-376 8 p.

Research output: Contribution to journalArticle

8 Scopus citations

The use of electron beam exposure and chemically enhanced vapor etching of SiO2 for nanoscale fabrication

Kozicki, M., Allgair, J., Jenkins-Gray, A., Ferry, D. K. & Whidden, T. K., Sep 1996, In : Physica B: Condensed Matter. 227, 1-4, p. 318-322 5 p.

Research output: Contribution to journalArticle

3 Scopus citations
1995

Catalyzed HF Vapor Etching of Silicon Dioxide for Micro- and Nanolithographic Masks

Whidden, T. K., Allgair, J., Ryan, J. M., Kozicki, M. & Ferry, D. K., Apr 1995, In : Journal of the Electrochemical Society. 142, 4, p. 1199-1205 7 p.

Research output: Contribution to journalArticle

13 Scopus citations

Directed growth of uromyces hyphae on integrated circuit substrates

Kozicki, M., Roberson, R. W., Whidden, T. K. & Kersey, S. E., May 1995, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 13, 3, p. 1808-1813 6 p.

Research output: Contribution to journalArticle

2 Scopus citations

Nanoscale scanning tunneling microscope patterning of silicon dioxide thin films by catalyzed HF vapor etching

Whidden, T. K., Allgair, J., Jenkins-Gray, A. & Kozicki, M., May 1 1995, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 13, 3, p. 1337-1341 5 p.

Research output: Contribution to journalConference article

11 Scopus citations
1994

Application of feed-forward and adaptive feedback control to semiconductor device manufacturing

Stoddard, K., Crouch, P., Kozicki, M. & Tsakalis, K., 1994, Proceedings of the American Control Conference. American Automatic Control Council, Vol. 1. p. 892-896 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations
1993

ExPro—An Expert System Based Process Management System

Rastogi, P., Kozicki, M. & Golshani, F., Aug 1993, In : IEEE Transactions on Semiconductor Manufacturing. 6, 3, p. 207-218 12 p.

Research output: Contribution to journalArticle

6 Scopus citations
1991

Pass - a chalcogenide-based lithography scheme for I.C. fabrication

Kozicki, M., Hsia, S. W., Owen, A. E. & Ewen, P. J. S., 1991, In : Journal of Non-Crystalline Solids. 137-138, PART 2, p. 1341-1344 4 p.

Research output: Contribution to journalArticle

21 Scopus citations

Some fundamental issues on metallization in VLSI (Invited Paper)

Ferry, D. K., Kozicki, M. & Raupp, G., Dec 1 1991, Proceedings of SPIE - The International Society for Optical Engineering. Gildenblat, G. S. & Schwartz, G. P. (eds.). Publ by Int Soc for Optical Engineering, p. 2-11 10 p. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 1596).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations
1989

As-S/Ag systems for integrated optics

Kozicki, M., Khawaja, Y., Owen, A. E., Ewen, P. J. S. & Zakery, A., 1989, Sixth Int VLSI Multilevel Interconnect Conf. Anon (ed.). Piscataway, NJ, United States: Publ by IEEE, p. 251-257 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Rapid thermal nitridation of thin SiO2 films

Henscheid, D., Kozicki, M., Sheets, G. W., Mughal, M., Zwiebel, I. & Graham, R. J., Mar 1 1989, In : Journal of Electronic Materials. 18, 2, p. 99-104 6 p.

Research output: Contribution to journalArticle

2 Scopus citations

Silicide/Polysilicon Layer Formation Using Dynamic Recoil Mixing

Kozicki, M., Robertson, J. M., Kheyrandish, H. & Hill, A. E., Mar 1989, In : Journal of the Electrochemical Society. 136, 3, p. 873-875 3 p.

Research output: Contribution to journalArticle

Silicide Formation on Polycrystalline Silicon by Direct Metal Implantation

Kozicki, M. & Robertson, J. M., Mar 1989, In : Journal of the Electrochemical Society. 136, 3, p. 878-881 4 p.

Research output: Contribution to journalArticle

1 Scopus citations
1988

Formation and oxidation of implanted cobalt silicides on polycrystalline-silicon.

Kozicki, M., 1988, 1988 Proc Fifth Int IEEE VLSI Multilevel Interconnect Conf. Piscataway, NJ, United States: Publ by IEEE, p. 198-204 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

The Effects of Nonuniform Oxide Thickness on MOSFET Performance

Zhang, Q. Z., Kozicki, M. & Schroder, D. K., Aug 1988, In : IEEE Transactions on Electron Devices. 35, 8, p. 1395-1397 3 p.

Research output: Contribution to journalArticle

1 Scopus citations
1984

A low energy electron beam annealing system: Design, capability and use

Kozicki, M. N., Dinnis, A. R. & Robertson, J. M., 1984, In : Scanning. 6, 2, p. 3-7 5 p.

Research output: Contribution to journalArticle

1 Scopus citations
1983

COBALT POLYCIDE - GATE LEVEL MATERIAL FOR VLSI.

Kozicki, M., Robertson, J. M. & Holwill, R., 1983, IEE Colloquium (Digest). 1983 /90 ed. IEE

Research output: Chapter in Book/Report/Conference proceedingConference contribution

ELECTRON-BEAM ANNEALING OF Co AND Cr IMPLANTED POLYCRYSTALLINE SILICON.

Kozicki, M. N. & Robertson, J. M., Dec 1 1983, Institute of Physics Conference Series. 67 ed. Inst of Physics, p. 137-142 6 p. (Institute of Physics Conference Series; no. 67).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations
1900

BIO-HYBRID INTEGRATED SYSTEMS

Kozicki, M., Jan 1 1900

Research output: Patent

Carbon Enhanced Vapor Etching

Kozicki, M., Jan 1 1900

Research output: Patent