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Research Output 1992 2019

1993
29 Citations (Scopus)

Growth kinetics and reaction mechanism of silicon chemical vapour deposition from silane

Tao, M., Feb 15 1993, In : Thin Solid Films. 223, 2, p. 201-211 11 p.

Research output: Contribution to journalArticle

Silanes
Growth kinetics
Silicon
silanes
Chemical vapor deposition
1992
7 Citations (Scopus)

Thermodynamic behavior of the Si-H system and its role in Si-CVD from SiH4

Tao, M. & Hunt, L. P., Mar 1992, In : Journal of the Electrochemical Society. 139, 3, p. 806-809 4 p.

Research output: Contribution to journalArticle

Chemical vapor deposition
vapor deposition
Thermodynamics
thermodynamics
Silanes